• In three dimensional integrated circuits (3D-ICs), through silicon via (TSV) is a critical technique in providing vertical connections. However, the yield and reliability is one of the key obstacles to adopt the TSV based 3D-ICs technology in industry. Various fault-tolerance structures using spare TSVs to repair faulty functional TSVs have been proposed in literature for yield and reliability enhancement, but a valid structure cannot always be found due to the lack of effective generation methods for fault-tolerance structures. In this paper, we focus on the problem of adaptive fault-tolerance structure generation. Given the relations between functional TSVs and spare TSVs, we first calculate the maximum number of tolerant faults in each TSV group. Then we propose an integer linear programming (ILP) based model to construct adaptive fault-tolerance struc- ture with minimal multiplexer delay overhead and hardware cost. We further develop a speed-up technique through efficient min-cost-max-flow (MCMF) model. All the proposed method- ologies are embedded in a top-down TSV planning framework to form functional TSV groups and generate adaptive fault- tolerance structures. Experimental results show that, compared with state-of-the-art, the number of spare TSVs used for fault tolerance can be effectively reduced.
  • Electron beam lithography (EBL) is a promising maskless solution for the technology beyond 14nm logic node. To overcome its throughput limitation, industry has proposed character projection (CP) technique, where some complex shapes (characters) can be printed in one shot. Recently the traditional EBL system is extended into multi-column cell (MCC) system to further improve the throughput. In MCC system, several independent CPs are used to further speed-up the writing process. Because of the area constraint of stencil, MCC system needs to be packed/planned carefully to take advantage of the characters. In this paper, we prove that the overlapping aware stencil planning (OSP) problem is NP-hard. To solve OSP problem in MCC system, we present a tool, E-BLOW, with several novel speedup techniques, such as successive relaxation, dynamic programming, and KD-Tree based clustering. Experimental results show that, compared with previous works, E-BLOW demonstrates better performance for both conventional EBL system and MCC system.
  • Triple patterning lithography (TPL) is one of the most promising techniques in the 14nm logic node and beyond. Conventional LELELE type TPL technology suffers from native conflict and overlapping problems. Recently, as an alternative process, triple patterning lithography with end cutting (LELE-EC) was proposed to overcome the limitations of LELELE manufacturing. In LELE-EC process the first two masks are LELE type double patterning, while the third mask is used to generate the end-cuts. Although the layout decomposition problem for LELELE has been well-studied in the literature, only few attempts have been made to address the LELE-EC layout decomposition problem. In this paper we propose the comprehensive study for LELE-EC layout decomposition. Conflict graph and end-cut graph are constructed to extract all the geometrical relationships of both input layout and end-cut candidates. Based on these graphs, integer linear programming (ILP) is formulated to minimize the conflict number and the stitch number. The experimental results demonstrate the effectiveness of the proposed algorithms.
  • For next-generation technology nodes, multiple patterning lithography (MPL) has emerged as a key solution, e.g., triple patterning lithography (TPL) for 14/11nm, and quadruple patterning lithography (QPL) for sub-10nm. In this paper, we propose a generic and robust layout decomposition framework for QPL, which can be further extended to handle any general K-patterning lithography (K$>$4). Our framework is based on the semidefinite programming (SDP) formulation with novel coloring encoding. Meanwhile, we propose fast yet effective coloring assignment and achieve significant speedup. To our best knowledge, this is the first work on the general multiple patterning lithography layout decomposition.
  • Low Power Design has become a significant requirement when the CMOS technology entered the nanometer era. Multiple-Supply Voltage (MSV) is a popular and effective method for both dynamic and static power reduction while maintaining performance. Level shifters may cause area and Interconnect Length Overhead (ILO), and should be considered at both floorplanning and post-floorplanning stages. In this paper, we propose a two phases algorithm framework, called VLSAF, to solve voltage and level shifter assignment problem. At floorplanning phase, we use a convex cost network flow algorithm to assign voltage and a minimum cost flow algorithm to handle level-shifter assignment. At post-floorplanning phase, a heuristic method is adopted to redistribute white spaces and calculate the positions and shapes of level shifters. The experimental results show VLSAF is effective.
  • With continued feature size scaling, even state of the art semiconductor manufacturing processes will often run into layouts with poor printability and yield. Identifying lithography hotspots is important at both physical verification and early physical design stages. While detailed lithography simulations can be very accurate, they may be too computationally expensive for full-chip scale and physical design inner loops. Meanwhile, pattern matching and machine learning based hotspot detection methods can provide acceptable quality and yet fast turn-around-time for full-chip scale physical verification and design. In this paper, we discuss some key issues and recent results on lithography hotspot detection and mitigation in nanometer VLSI.
  • Triple patterning lithography (TPL) has received more and more attentions from industry as one of the leading candidate for 14nm/11nm nodes. In this paper, we propose a high performance layout decomposer for TPL. Density balancing is seamlessly integrated into all key steps in our TPL layout decomposition, including density-balanced semi-definite programming (SDP), density-based mapping, and density-balanced graph simplification. Our new TPL decomposer can obtain high performance even compared to previous state-of-the-art layout decomposers which are not balanced-density aware, e.g., by Yu et al. (ICCAD'11), Fang et al. (DAC'12), and Kuang et al. (DAC'13). Furthermore, the balanced-density version of our decomposer can provide more balanced density which leads to less edge placement error (EPE), while the conflict and stitch numbers are still very comparable to our non-balanced-density baseline.
  • As technology scales, low power design has become a significant requirement for SOC designers. Among the existing techniques, Multiple-Supply Voltage (MSV) is a popular and effective method to reduce both dynamic and static power. Besides, level shifters consume area and delay, and should be considered during floorplanning. In this paper, we present a new floorplanning system, called MVLSAF, to solve multi-voltage and level shifter assignment problem. We use a convex cost network flow algorithm to assign arbitrary number of legal working voltages and a minimum cost flow algorithm to handle level-shifter assignment. The experimental results show MVLSAF is effective.
  • In this paper, we examine the integration potential and explore the design space of low power thermal reliable on-chip interconnect synthesis featuring nanophotonics Wavelength Division Multiplexing (WDM). With the recent advancements, it is foreseen that nanophotonics holds the promise to be employed for future on-chip data signalling due to its unique power efficiency, signal delay and huge multiplexing potential. However, there are major challenges to address before feasible on-chip integration could be reached. In this paper, we present GLOW, a hybrid global router to provide low power opto-electronic interconnect synthesis under the considerations of thermal reliability and various physical design constraints such as optical power, delay and signal quality. GLOW is evaluated with testing cases derived from ISPD07-08 global routing benchmarks. Compared with a greedy approach, GLOW demonstrates around 23%-50% of total optical power reduction, revealing great potential of on-chip WDM interconnect synthesis.
  • In this paper we present EPIC, an efficient and effective predictor for IC manufacturing hotspots in deep sub-wavelength lithography. EPIC proposes a unified framework to combine different hotspot detection methods together, such as machine learning and pattern matching, using mathematical programming/optimization. EPIC algorithm has been tested on a number of industry benchmarks under advanced manufacturing conditions. It demonstrates so far the best capability in selectively combining the desirable features of various hotspot detection methods (3.5-8.2% accuracy improvement) as well as significant suppression of the detection noise (e.g., 80% false-alarm reduction). These characteristics make EPIC very suitable for conducting high performance physical verification and guiding efficient manufacturability friendly physical design.
  • TPL-friendly detailed routers require a systematic approach to detect TPL conflicts. However, the complexity of conflict graph (CG) impedes directly detecting TPL conflicts in CG. This work proposes a token graph-embedded conflict graph (TECG) to facilitate the TPL conflict detection while maintaining high coloring-flexibility. We then develop a TPL aware detailed router (TRIAD) by applying TECG to a gridless router with the TPL stitch generation. Compared to a greedy coloring approach, experimental results indicate that TRIAD generates no conflicts and few stitches with shorter wirelength at the cost of 2.41x of runtime.
  • As the feature size of semiconductor process further scales to sub-16nm technology node, triple patterning lithography (TPL) has been regarded one of the most promising lithography candidates. M1 and contact layers, which are usually deployed within standard cells, are most critical and complex parts for modern digital designs. Traditional design flow that ignores TPL in early stages may limit the potential to resolve all the TPL conflicts. In this paper, we propose a coherent framework, including standard cell compliance and detailed placement to enable TPL friendly design. Considering TPL constraints during early design stages, such as standard cell compliance, improves the layout decomposability. With the pre-coloring solutions of standard cells, we present a TPL aware detailed placement, where the layout decomposition and placement can be resolved simultaneously. Our experimental results show that, with negligible impact on critical path delay, our framework can resolve the conflicts much more easily, compared with the traditional physical design flow and followed layout decomposition.
  • Layout fracturing is a fundamental step in mask data preparation and e-beam lithography (EBL) writing. To increase EBL throughput, recently a new L-shape writing strategy is proposed, which calls for new L-shape fracturing, versus the conventional rectangular fracturing. Meanwhile, during layout fracturing, one must minimize very small/narrow features, also called slivers, due to manufacturability concern. This paper addresses this new research problem of how to perform L-shaped fracturing with sliver minimization. We propose two novel algorithms. The first one, rectangular merging (RM), starts from a set of rectangular fractures and merges them optimally to form L-shape fracturing. The second algorithm, direct L-shape fracturing (DLF), directly and effectively fractures the input layouts into L-shapes with sliver minimization. The experimental results show that our algorithms are very effective.
  • Triple patterning lithography (TPL) is one of the most promising techniques in the 14nm logic node and beyond. However, traditional LELELE type TPL technology suffers from native conflict and overlapping problems. Recently LELEEC process was proposed to overcome the limitations, where the third mask is used to generate the end-cuts. In this paper we propose the first study for LELEEC layout decomposition. Conflict graphs and end-cut graphs are constructed to extract all the geometrical relationships of input layout and end-cut candidates. Based on these graphs, integer linear programming (ILP) is formulated to minimize the conflict number and the stitch number.
  • Electron beam lithography (EBL) is a promising maskless solution for the technology beyond 14nm logic node. To overcome its throughput limitation, recently the traditional EBL system is extended into MCC system. %to further improve the throughput. In this paper, we present E-BLOW, a tool to solve the overlapping aware stencil planning (OSP) problems in MCC system. E-BLOW is integrated with several novel speedup techniques, i.e., successive relaxation, dynamic programming and KD-Tree based clustering, to achieve a good performance in terms of runtime and solution quality. Experimental results show that, compared with previous works, E-BLOW demonstrates better performance for both conventional EBL system and MCC system.
  • Self-aligned double patterning (SADP) has become a promising technique to push pattern resolution limit to sub-22nm technology node. Although SADP provides good overlay controllability, it encounters many challenges in physical design stages to obtain conflict-free layout decomposition. In this paper, we study the impact on placement by different standard cell layout decomposition strategies. We propose a SADP friendly standard cell configuration which provides pre-coloring results for standard cells. These configurations are brought into the placement stage to help ensure layout decomposability and save the extra effort for solving conflicts in later stages.
  • As minimum feature size and pitch spacing further decrease, triple patterning lithography (TPL) is a possible 193nm extension along the paradigm of double patterning lithography (DPL). However, there is very little study on TPL layout decomposition. In this paper, we show that TPL layout decomposition is a more difficult problem than that for DPL. We then propose a general integer linear programming formulation for TPL layout decomposition which can simultaneously minimize conflict and stitch numbers. Since ILP has very poor scalability, we propose three acceleration techniques without sacrificing solution quality: independent component computation, layout graph simplification, and bridge computation. For very dense layouts, even with these speedup techniques, ILP formulation may still be too slow. Therefore, we propose a novel vector programming formulation for TPL decomposition, and solve it through effective semidefinite programming (SDP) approximation. Experimental results show that the ILP with acceleration techniques can reduce 82% runtime compared to the baseline ILP. Using SDP based algorithm, the runtime can be further reduced by 42% with some tradeoff in the stitch number (reduced by 7%) and the conflict (9% more). However, for very dense layouts, SDP based algorithm can achieve 140x speed-up even compared with accelerated ILP.
  • Low power design has become one of the most significant requirements when CMOS technology entered the nanometer era. Therefore, timing budget is often performed to slow down as many components as possible so that timing slacks can be applied to reduce the power consumption while maintaining the performance of the whole design. Retiming is a procedure that involves the relocation of flip-flops (FFs) across logic gates to achieve faster clocking speed. In this paper we show that the retiming and slack budgeting problem can be formulated to a convex cost dual network flow problem. Both the theoretical analysis and experimental results show the efficiency of our approach which can not only reduce power consumption by 8.9%, but also speedup previous work by 500 times.
  • Network-on-chip (NoC) architectures have been proposed as a promising alternative to classical bus-based communication architectures. In this paper, we propose a two phases framework to solve application-specific NoCs topology generation problem. At floorplanning phase, we carry out partition driven floorplanning. At post-floorplanning phase, a heuristic method and a min-cost max-flow algorithm is used to insert switches and network interfaces. Finally, we allocate paths to minimize power consumption. The experimental results show our algorithm is effective for power saving.