
The finite element analysis of high frequency vibrations of quartz crystal
plates is a necessary process required in the design of quartz crystal
resonators of precision types for applications in filters and sensors. The
anisotropic materials and extremely high frequency in radiofrequency range of
resonators determine that vibration frequency spectra are complicated with
strong couplings of large number of different vibration modes representing
deformations which do not appear in usual structural problems. For instance,
the higherorder thicknessshear vibrations usually representing the sharp
deformation of thin plates in the thickness direction, expecting the analysis
is to be done with refined meshing schemes along the relatively small thickness
and consequently the large plane area. To be able to represent the precise
vibration mode shapes, a very large number of elements are needed in the finite
element analysis with either the threedimensional theory or the higherorder
plate theory, although considerable reduction of numbers of degreeoffreedom
(DOF) are expected for the twodimensional analysis without scarifying the
accuracy. In this paper, we reviewed the software architecture for the analysis
and demonstrated the evaluation and tuning of parameters for the improvement of
the analysis with problems of elements with a large number of DOF in each node,
or a problem with unusually large bandwidth of the banded stiffness and mass
matrices in comparison with conventional finite element formulation. Such a
problem can be used as an example for the optimization and tuning of problems
from multiphysics analysis which are increasingly important in applications
with excessive large number of DOF and bandwidth in engineering.

The Mindlin plate equations with the consideration of thicknessshear
deformation as an independent variable have been used for the analysis of
vibrations of quartz crystal resonators of both rectangular and circular types.
The Mindlin or Lee plate theories that treat thicknessshear deformation as an
independent higherorder vibration mode in a coupled system of twodimensional
variables are the choice of theory for analysis. For circular plates, we
derived the Mindlin plate equations in a systematic manner as demonstrated by
Mindlin and others and obtained the truncated twodimensional equations of
closely coupled modes in polar coordinates. We simplified the equations for
vibration modes in the vicinity of fundamental thicknessshear frequency and
validated the equations and method. To explore newer structures of quartz
crystal resonators, we utilized the Mindlin plate equations for the analysis of
annular plates with fixed inner and free outer edges for frequency spectra. The
detailed analysis of vibrations of circular plates for the normalized frequency
versus dimensional parameters provide references for optimal selection of
parameters based on the principle of strong thicknessshear mode and minimal
presence of other modes to enhance energy trapping through maintaining the
strong and pure thicknessshear vibrations insensitive to some complication
factors such as thermal and initial stresses.

For quartz crystal resonators of thicknessshear type, the vibration
frequency and mode shapes, which are key features of resonators in circuit
applications, reflect the basic material and structural properties of the
quartz plate and its variation with time under various factors such as erosive
gases and liquids that can cause surface and internal damages and degradation
of crystal blanks. The accumulated effects eventually will change the surface
conditions in terms of elastic constants and stiffness and more importantly,
the gradient of such properties along the thickness. This is a typical
functionally graded materials (FGM) structure and has been studied extensively
for structural applications under multiple loadings such as thermal and
electromagnetic fields in recent years. For acoustic wave resonators, such
studies are equally important and the wave propagation in FGM structures can be
used in the evaluation and assessment of performance, reliability, and life of
sensors based on acoustic waves such as the quartz crystal microbalances (QCM).
Now we studied the thicknessshear vibrations of FGM plates with properties of
ATcut quartz crystal varying along the thickness in a general pattern
represented by a trigonometric function with both sine and cosine functions of
the thickness coordinate. The solutions are obtained by using Fourier expansion
of the plate deformation. We also obtained the frequency changes of the
fundamental and overtone modes which are strongly coupled for the evaluation of
resonator structures with property variation or design to take advantages of
FGM in novel applications.

Properties of the quartz crystal blank of a resonator is assumed homogeneous,
uniform, and perfect in design, manufacturing, and applications. As end
products, quartz crystal resonators are frequently exposed to gases and liquids
which can cause surface damage and internal degradation of blanks under
increasingly hostile conditions. The combination of service conditions and
manufacturing process including chemical etching and polishing can inevitably
modify the surface of quartz crystal blanks with changes of material
properties, raising the question of what will happen to vibrations of quartz
crystal resonators of thicknessshear type if such modifications to blanks are
to be evaluated for sensitive applications. Such questions have been
encountered in other materials and structures with property variations either
on purpose or as the effect of environmental or natural processes commonly
referred to as functionally graded materials, or FGMs. Analyses have been done
in applications as part of studies on FGMs in structural as well as in acoustic
wave device applications. A procedure based on series solutions has been
developed in the evaluation of frequency changes and features in an infinite
quartz crystal plate of ATcut with the symmetric material variation pattern
given in a cosine function with the findings that the vibration modes are now
closely coupled. These results can be used in the evaluation of surface damage
and corrosion of quartz crystal blanks of resonators in sensor applications or
development of new structures of resonators.

A nonlinear analysis of highfrequency thicknessshear vibrations of ATcut
quartz crystal plates is presented with the twodimensional finite element
method. We expanded both kinematic and constitutive nonlinear Mindlin plate
equations and then truncated them to the firstorder equations as an
approximation, which is used later for the formulation of nonlinear finite
element analysis with all zeroth and firstorder displacements and electric
potentials. The matrix equation of motion is established with the firstorder
harmonic approximation and the generalized nonlinear eigensystem is solved by a
direct iterative procedure. A backbone curve and corresponding mode shapes are
obtained and analyzed. The nonlinear finite element program is developed based
on earlier linear edition and can be utilized to predict nonlinear
characteristics of miniaturized quartz crystal resonators in the design
process.