• The finite element analysis of high frequency vibrations of quartz crystal plates is a necessary process required in the design of quartz crystal resonators of precision types for applications in filters and sensors. The anisotropic materials and extremely high frequency in radiofrequency range of resonators determine that vibration frequency spectra are complicated with strong couplings of large number of different vibration modes representing deformations which do not appear in usual structural problems. For instance, the higher-order thickness-shear vibrations usually representing the sharp deformation of thin plates in the thickness direction, expecting the analysis is to be done with refined meshing schemes along the relatively small thickness and consequently the large plane area. To be able to represent the precise vibration mode shapes, a very large number of elements are needed in the finite element analysis with either the three-dimensional theory or the higher-order plate theory, although considerable reduction of numbers of degree-of-freedom (DOF) are expected for the two-dimensional analysis without scarifying the accuracy. In this paper, we reviewed the software architecture for the analysis and demonstrated the evaluation and tuning of parameters for the improvement of the analysis with problems of elements with a large number of DOF in each node, or a problem with unusually large bandwidth of the banded stiffness and mass matrices in comparison with conventional finite element formulation. Such a problem can be used as an example for the optimization and tuning of problems from multi-physics analysis which are increasingly important in applications with excessive large number of DOF and bandwidth in engineering.
  • The Mindlin plate equations with the consideration of thickness-shear deformation as an independent variable have been used for the analysis of vibrations of quartz crystal resonators of both rectangular and circular types. The Mindlin or Lee plate theories that treat thickness-shear deformation as an independent higher-order vibration mode in a coupled system of two-dimensional variables are the choice of theory for analysis. For circular plates, we derived the Mindlin plate equations in a systematic manner as demonstrated by Mindlin and others and obtained the truncated two-dimensional equations of closely coupled modes in polar coordinates. We simplified the equations for vibration modes in the vicinity of fundamental thickness-shear frequency and validated the equations and method. To explore newer structures of quartz crystal resonators, we utilized the Mindlin plate equations for the analysis of annular plates with fixed inner and free outer edges for frequency spectra. The detailed analysis of vibrations of circular plates for the normalized frequency versus dimensional parameters provide references for optimal selection of parameters based on the principle of strong thickness-shear mode and minimal presence of other modes to enhance energy trapping through maintaining the strong and pure thickness-shear vibrations insensitive to some complication factors such as thermal and initial stresses.
  • For quartz crystal resonators of thickness-shear type, the vibration frequency and mode shapes, which are key features of resonators in circuit applications, reflect the basic material and structural properties of the quartz plate and its variation with time under various factors such as erosive gases and liquids that can cause surface and internal damages and degradation of crystal blanks. The accumulated effects eventually will change the surface conditions in terms of elastic constants and stiffness and more importantly, the gradient of such properties along the thickness. This is a typical functionally graded materials (FGM) structure and has been studied extensively for structural applications under multiple loadings such as thermal and electromagnetic fields in recent years. For acoustic wave resonators, such studies are equally important and the wave propagation in FGM structures can be used in the evaluation and assessment of performance, reliability, and life of sensors based on acoustic waves such as the quartz crystal microbalances (QCM). Now we studied the thickness-shear vibrations of FGM plates with properties of AT-cut quartz crystal varying along the thickness in a general pattern represented by a trigonometric function with both sine and cosine functions of the thickness coordinate. The solutions are obtained by using Fourier expansion of the plate deformation. We also obtained the frequency changes of the fundamental and overtone modes which are strongly coupled for the evaluation of resonator structures with property variation or design to take advantages of FGM in novel applications.
  • Properties of the quartz crystal blank of a resonator is assumed homogeneous, uniform, and perfect in design, manufacturing, and applications. As end products, quartz crystal resonators are frequently exposed to gases and liquids which can cause surface damage and internal degradation of blanks under increasingly hostile conditions. The combination of service conditions and manufacturing process including chemical etching and polishing can inevitably modify the surface of quartz crystal blanks with changes of material properties, raising the question of what will happen to vibrations of quartz crystal resonators of thickness-shear type if such modifications to blanks are to be evaluated for sensitive applications. Such questions have been encountered in other materials and structures with property variations either on purpose or as the effect of environmental or natural processes commonly referred to as functionally graded materials, or FGMs. Analyses have been done in applications as part of studies on FGMs in structural as well as in acoustic wave device applications. A procedure based on series solutions has been developed in the evaluation of frequency changes and features in an infinite quartz crystal plate of AT-cut with the symmetric material variation pattern given in a cosine function with the findings that the vibration modes are now closely coupled. These results can be used in the evaluation of surface damage and corrosion of quartz crystal blanks of resonators in sensor applications or development of new structures of resonators.
  • A nonlinear analysis of high-frequency thickness-shear vibrations of AT-cut quartz crystal plates is presented with the two-dimensional finite element method. We expanded both kinematic and constitutive nonlinear Mindlin plate equations and then truncated them to the first-order equations as an approximation, which is used later for the formulation of nonlinear finite element analysis with all zeroth- and first-order displacements and electric potentials. The matrix equation of motion is established with the first-order harmonic approximation and the generalized nonlinear eigensystem is solved by a direct iterative procedure. A backbone curve and corresponding mode shapes are obtained and analyzed. The nonlinear finite element program is developed based on earlier linear edition and can be utilized to predict nonlinear characteristics of miniaturized quartz crystal resonators in the design process.